| abstract |
The present invention provides a fluorine-containing elastomer molded article, which is capable of withstanding use in high temperatures of 275° C. or higher and has resistance to high density plasma. Specifically, the present invention provides a fluorine-containing elastomer molded article obtained by crosslinking with a heat resistant crosslinking agent a crosslinkable fluorine-containing elastomer composition comprising an inorganic filler having a average primary particle size of at most 0.5 μm, such as α-type aluminum oxide and aluminum nitride, and a fluorine-containing elastomer component having a CN group or a COOH group, such as a perfluoro elastomer. |