http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005014094-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-162 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-151 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2004-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ff88a16988091e8078155d078a69b19 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a2edd1b614d9b235c247ae7895e9e7c |
| publicationDate | 2005-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005014094-A1 |
| titleOfInvention | Organic anti-reflective coating composition and pattern forming method using the same |
| abstract | Disclosed are an organic anti-reflective coating composition which is introduced to top portion of a photoresist and a pattern forming method using the same, in a process for forming ultra-fine patterns of photoresist for photolithography by using 193 nm ArF or 157 nm VUV light source, and more particularly to, an organic anti-reflective coating composition which can protect photoresist from atmospheric amine to minimize a post exposure delay effect, and minimize pattern distortion caused by diffused reflection, i.e., a swing phenomenon, with the improvement of a notching phenomenon and the reduction of reflection rate, and a patterning forming method using the same. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7544750-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007087285-A1 |
| priorityDate | 2003-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.