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publicationDate 2005-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005009322-A1
titleOfInvention Slurry for CMP, and method of manufacturing semiconductor device
abstract There is disclosed a CMP slurry which comprises a solvent, abrasive grains, and a silicone-based surfactant having an HLB value ranging from 7 to 20.
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