| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24926
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31691
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-10 |
| filingDate |
2004-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7d3c297b11dfd81d2f783f74cc61088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_730f5d0d03f5363d0bffa103c1fe9cc1 |
| publicationDate |
2004-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004247844-A1 |
| titleOfInvention |
Ceramic material coating method and ceramic film |
| abstract |
A ceramic material coating method of forming a coating film on a base by applying a ceramic material including a complex oxide to the base by spin coating, the method includes: a first rotational step of rotating the base at a predetermined rotational speed; a second rotational step of rotating the base at a rotational speed lower than the rotational speed in the first rotational step; and a third rotational step of rotating the base at a rotational speed higher than the rotational speed in the second rotational step. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10329452-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3472856-A4 |
| priorityDate |
2003-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |