| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0759
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1476
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1105 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-441
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-10 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-46 |
| filingDate |
2002-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_236f72442bd8852794f3177d0da23c8a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ce404785cbfefc05bec5fc3a51b7072 |
| publicationDate |
2004-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004241338-A1 |
| titleOfInvention |
Planarized microelectronic substrates |
| abstract |
The instant invention is a process for planarizing a microelectronic substrate with a cross-linked polymer dielectric layer, comprising the steps of: (a) heating such a substrate coated with a layer comprising an uncured cross-linkable polymer and a glass transition suppression modifier to a temperature greater than the glass transition temperature of the layer, the temperature being less than the curing temperature of the uncured cross-linkable polymer to form a substrate coated with a heat flowed layer; and (b) heating the substrate coated with the heat flowed layer to a curing temperature of the uncured cross-linkable polymer of the heated layer to cure the uncured cross-linkable polymer to form a planarized substrate wherein the percent planarization at 100 micrometers is greater than fifty percent. The instant invention is a microelectronic device made using the above-described process. The instant invention is a composition of matter, comprising: an essentially solvent free composition comprising an uncured cross-linkable polymer and a glass transition suppression modifier, the composition having a glass transition temperature sufficiently less than the curing temperature of the uncured composition so that if the uncured composition is heated to a temperature above its glass transition temperature but below its curing temperature, the uncured composition will flow. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9423472-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7906180-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7122079-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9231026-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8076386-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010098940-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8415010-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8808808-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002177291-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7759407-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I554600-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9812496-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011140306-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7981481-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557351-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9570676-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008160460-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7659051-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006202291-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007272825-A1 |
| priorityDate |
2001-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |