http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004237880-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70966 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-23 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2003-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfd0950bbb6e3c46c1c807cdccdf46e5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9754bd12f7563f985777f2c6bc361616 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fb9a83a964cef83244b9975084af292 |
| publicationDate | 2004-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2004237880-A1 |
| titleOfInvention | Method for manufacturing an optical member formed of a fluoride crystal |
| abstract | A method for manufacturing an optical member of a fluoride crystal includes: a growing step of growing an ingot of a fluoride crystal; a cutting-out step of cutting out from the ingot a cylindrical basic material with two parallel planes which have a certain crystal plane orientation; an orientation-determining step of determining a crystal orientation of a side surface of the cylindrical basic material; a birefringence-measuring step of measuring birefringence in a specific crystal axis direction at the side surface determined based on the crystal orientation determined in the orientation-determining step; and an evaluating step of evaluating the fluoride crystal on the basis of a result of measurement of the birefringence. A fluoride crystal is obtained in which a maximum value of birefringence in a specific crystal axis direction at a side surface is not more than 10 nm/cm at a measurement wavelength of 633 nm. A high-resolution lens suitable for an oblique incident beam and an exposure apparatus using the lens are provided. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10611676-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2955503-A1 |
| priorityDate | 2002-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.