abstract |
An objective of the present invention is to provide a ceramic heater having good temperature controllability, wherein a ceramic substrate is used as a base material of the heater, and a resistance heating element having superior durability such as superior oxidization resistance is set up. The ceramic heater of the present invention is characterized in that a resistance heating element composed of one circuit or more circuits is arranged on a ceramic substrate and an insulating covering is deposited on the resistance heating element. |