| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2259-4148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-112 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-0423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-0446
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-75 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-75 |
| filingDate |
2003-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6fb386d84c56990b8dd928f1752efaf |
| publicationDate |
2004-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004206237-A1 |
| titleOfInvention |
Abatement system targeting a by-pass effluent stream of a semiconductor process tool |
| abstract |
An apparatus and method for abating toxic and/or hazardous gas species in a diluent gas stream line deriving from a by-pass line of a semiconductor process tool, comprising contacting the diluent gas stream with a dry resin sorbent material having an affinity for the toxic and/or hazardous gas species to effect the removal of at least a portion of the toxic and/or hazardous gas species by a chemisorbent or physisorbent reaction between the sorbent bed and the toxic gas component effectively reduces the concentration of the toxic gas component in the process diluent stream to below TLV. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10386121-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016348238-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11396699-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015202462-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015107800-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8282023-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I588413-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110479063-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005087072-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011226874-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022333238-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2432590-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103288139-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2432590-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7018448-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007128358-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9169555-B2 |
| priorityDate |
2003-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |