| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76832
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2004-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f34bf450ffd70f5148b6f16dc1567f41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4aebbef3ed7082da4fe77e9e3db16391
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_237510af44eeb2230f4d1f7258000c8e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18b3fdb51f34dba867063ca30358e1e6 |
| publicationDate |
2004-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004195659-A1 |
| titleOfInvention |
Hydrogenated oxidized silicon carbon material |
| abstract |
A low dielectric constant, thermally stable hydrogenated oxidized silicon carbon film which can be used as an interconnect dielectric in IC chips is disclosed. Also disclosed is a method for fabricating a thermally stable hydrogenated oxidized silicon carbon low dielectric constant film utilizing a plasma enhanced chemical vapor deposition technique. Electronic devices containing insulating layers of thermally stable hydrogenated oxidized silicon carbon low dielectric constant materials that are prepared by the method are further disclosed. To enable the fabrication of thermally stable hydrogenated oxidized silicon carbon low dielectric constant film, specific precursor materials having a ring structure are preferred. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010028695-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1856735-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020000379-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10780675-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020000380-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016215388-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112567512-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1856735-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107399114-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8110493-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010099271-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020000376-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7745346-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9765429-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112567495-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7998880-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112567521-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112567511-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017334177-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006278959-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I712146-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7786552-B2 |
| priorityDate |
2000-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |