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filingDate 2003-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2004137757-A1
titleOfInvention Method and apparatus to improve cracking thresholds and mechanical properties of low-k dielectric material
abstract One embodiment of the present invention is a method for depositing low-k dielectric films that includes steps of: (a) CVD-depositing a low-k dielectric film; and (b) plasma treating the CVD-deposited, low-k dielectric film.
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