| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
2003-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2f819bbca745f2c24e0287a466f8579
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07ff795b888c53413697808a1db9595a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93a263a2612ea4178e0450f9f9e38257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6fae8f1f3574d079305c7ceb511b579
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c371196d5b8e521844e21252617b0958 |
| publicationDate |
2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004130031-A1 |
| titleOfInvention |
Forming chemical vapor depositable low dielectric constant layers |
| abstract |
Carborane may be used as a precursor to form low dielectric constant dielectrics. The carborane material may be modified to enable it to be deposited by chemical vapor deposition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017099701-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008277796-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8426545-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7863749-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7563727-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I414042-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012231194-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005221220-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007296064-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006292707-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7439179-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006097359-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9428629-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7192686-B2 |
| priorityDate |
2003-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |