| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-80 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02181 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04 |
| filingDate |
2003-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97f9b21d474312196a9de7e2bdd14624
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e13d7a1b4191a24ff50fa79678059fbe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5858b0588d210822781e729c16905ce6 |
| publicationDate |
2004-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004113195-A1 |
| titleOfInvention |
Precursor for hafnium oxide layer and method for forming halnium oxide film using the precursor |
| abstract |
A hafnium oxide precursor and a method for forming a hafnium oxide layer using the precursor are provided. The hafnium oxide precursor contains a nitrogen compound bound to HfCl 4 . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007119125-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8048484-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007123060-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006199384-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I427182-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111033686-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010151261-A1 |
| priorityDate |
2002-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |