| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2003-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6817adb554f32a2b048c6f92ea142d6c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_570bb18564ddffe2906fba4f97879e1f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6183b7e26ebc061621b2e2698753aa85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb53bca5619b69af9f5840ad6b2b674e |
| publicationDate |
2004-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004102142-A1 |
| titleOfInvention |
Polishing composition |
| abstract |
A polishing composition comprising an improver of a ratio of a polishing rate of an insulating film to that of a stopper film, wherein the polishing rate of the stopper film is selectively decreased, comprising one or more compounds selected from the group consisting of a monoamine or diamine compound; a polyamine having three or more amino groups in its molecule; an ether group-containing amine; and a heterocyclic compound having nitrogen atom. The polishing composition can be used for removing an insulating film which has been embedded for isolation into a trench formed on a silicon substrate and sedimented outside the trench, thereby planing a surface of the silicon substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009170742-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9159352-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008070482-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012156968-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010113634-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10227506-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009181539-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101481640-B |
| priorityDate |
2000-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |