| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-10 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18 |
| filingDate |
2003-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fa2b9ce78f49e99de31b5d5c1aa19ea |
| publicationDate |
2004-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004087182-A1 |
| titleOfInvention |
Method for synthesizing polymeric material, method for forming polymer thin film and method for forming interlayer insulating film |
| abstract |
A Lewis acid-base reaction is caused, in a solution, between a first monomer corresponding to a Lewis acid and a second monomer corresponding to a Lewis base, so as to generate a monomer adduct in which the first monomer and the second monomer are bonded to each other through weak electric interaction. Next, the solution including the monomer adduct is applied on a substrate so as to form a supramolecular solid thin film made of the monomer adduct. Then, the supramolecular solid thin film is heated so as to cause a polymerization reaction between the first monomer and the second monomer within the supramolecular solid thin film, thereby forming a polymer thin film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8178631-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1953181-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1683822-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1953181-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017080795-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007078256-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009214860-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009318610-A1 |
| priorityDate |
2002-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |