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publicationDate 2004-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2004085409-A1
titleOfInvention Ink jet recording head having piezoelectric element and electrode patterned with same shape and without pattern shift therebetween
abstract An ink jet recording head comprising: a nozzle orifice for jetting ink; an ink chamber communicating with the nozzle; a diaphragm for pressurizing ink in the ink chamber; a piezoelectric thin film on the diaphragm; and an electrode for the piezoelectric thin film wherein the piezoelectric thin film and the electrode are patterned to the same shape.
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