| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14491 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04591
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04588
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J29-38 |
| filingDate |
2003-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7e8ac3669252f96e2d8da3b313c0194 |
| publicationDate |
2004-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004080556-A1 |
| titleOfInvention |
Method of ejecting liquid from a micro-electromechanical device |
| abstract |
A method of fabricating a printhead chip that includes a plurality of nozzle arrangements, each nozzle arrangement having nozzle chamber walls that define a nozzle chamber and an ink ejection port bounded by a rim includes the step of depositing a sacrificial layer on a substrate having drive circuitry formed on the substrate. The sacrificial layer is etched to define deposition zones for the nozzle chamber walls and the rim. A conformal layer of structural material is deposited on the sacrificial layer. The conformal layer is planarized to a predetermined depth to define each ink ejection port bounded by its respective rim. The sacrificial layer is then etched away. |
| priorityDate |
1998-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |