| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61P31-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2002-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_374621ce4a006d7fb99427e586c62a58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a07a1d204fac9f11ad72eb8c78ef3cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90869f8ab4d57b205b43639c4cdf1e0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea52301072d24687879d858d3bcbc879 |
| publicationDate |
2004-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004077162-A1 |
| titleOfInvention |
Thermal activation of fluorine for use in a semiconductor chamber |
| abstract |
A method and system for thermally activating a oxidizing cleaning gas for use in a semiconductor process chamber cleaning process. The oxidizing cleaning gas is thermally activated by reacting the oxidizing cleaning gas with heated inert gas. The resulting thermally activated oxidizing cleaning gas does not readily deactivate, thus providing enhanced cleaning capabilities. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011020187-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006254613-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010022095-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I475611-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8278222-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11434565-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007117396-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11359278-B2 |
| priorityDate |
2002-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |