| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 |
| filingDate |
2003-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d7b964478c88f2084cc1a97f28c30ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_106c83c1afd0d38c38d97443364cf3cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2f1768cde39f76d321fdd1907998a96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e0104dcf7c061a3b595f8207063c5d2 |
| publicationDate |
2004-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004069612-A1 |
| titleOfInvention |
Substrate processing apparatus and substrate processing method |
| abstract |
A substrate processing apparatus includes a light source, a plurality of light transmitting windows, and a reaction chamber, in which a substrate is placed. And a surface of the substrate, which opposes the light transmitting windows is processed by using a reaction which occurs when the light from the light source is irradiated into the reaction chamber through the light transmitting windows. This substrate processing apparatus includes a driving mechanism which moves the substrate relative to the light transmitting windows in a direction parallel to the surface. The width of each of the light transmitting windows in the direction in which the substrate moves relative to the light transmitting windows is smaller than the length of the substrate in the moving direction. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10354894-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009053966-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005275791-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7548300-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I792577-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7705961-B2 |
| priorityDate |
2002-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |