http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004047785-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-389 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C19-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-389 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C19-08 |
| filingDate | 2002-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_692f9d9fdddf3afff3a108429445e079 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ccd97305b819cf173e4b20727404bf7 |
| publicationDate | 2004-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2004047785-A1 |
| titleOfInvention | Process for purifying octafluoropropane, process for preparing the same, and use thereof |
| abstract | A process for purifying octafluoropropane according to the present invention comprises the step of contacting a crude octafluoropropane containing impurities with an impurity decomposing agent under elevated temperature and then with an adsorbent to substantially remove the impurities from the crude octafluoropropane. n According to the purification process or preparation process of octafluoropropane of the present invention, the impurities such as chlorine compounds can be substantially removed and a high-purity octafluoropropane can be easily obtained. The octafluoropropane obtained by the purification process of the present invention is substantially free of impurities and therefore, can be used as an etching or cleaning gas for use in the production process of a semiconductor device and the like. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114436763-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114471468-A |
| priorityDate | 2001-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.