| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2001-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_715a3c8c23494b886c79ad08d1120949
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94989f249f88a1c73d3a58b0847b7b2e |
| publicationDate |
2004-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004026403-A1 |
| titleOfInvention |
Ceramic heater for semiconductor manufacturing and inspecting devices |
| abstract |
An object of the present invention is to provide a ceramic heater for a semiconductor-producing/examining device which has a short temperature dropping time and can be rapidly cooled. The present invention is a ceramic heater for a semiconductor-producing/examining device comprising a resistance heating element on a surface thereof, wherein the resistance heating element has a surface roughness Ra according to JIS B 0601 of 0.01 μm or more. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004099708-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005258164-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8739609-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005153826-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005231829-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010242577-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006088692-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005008835-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005014031-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005011878-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005016987-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10636690-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7092173-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005023269-A1 |
| priorityDate |
2000-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |