| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-485 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76819
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2003-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ceba1f9115af0a2296f35a0db4154d0 |
| publicationDate |
2004-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004009655-A1 |
| titleOfInvention |
Method for manufacturing metal line contact plugs for semiconductor devices |
| abstract |
A method for manufacturing a metal line contact plug of a semiconductor device is disclosed. A stable landing plug poly is formed by etching an interlayer insulating film by using a CMP (chemical mechanical polishing) slurry for an oxide film that includes an alkyl ammonium salt having a high affinity to the oxide film without damaging the hard mask nitride film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014377887-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9040315-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111383919-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019312043-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005227478-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6946388-B1 |
| priorityDate |
2002-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |