| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate |
2003-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59f122bcc75cec69291eb45a19808544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_853861c0b322e06c4a82d380374b3c87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7499e0c8dbbb9caf64bbc72433d78ab2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a5e27cb33dcee3594a1877478857e98 |
| publicationDate |
2004-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004009427-A1 |
| titleOfInvention |
Negative resist composition |
| abstract |
A negative resist composition is provided which is less likely to swell in an alkali developing solution. An alkali-developable negative resist composition is disclosed comprising a compound (A) which generates an acid upon exposure to radiation, and a resin component (B) which becomes insoluble in alkali under the action of an acid, wherein the component (B) is a resin component containing: (b1) a unit which becomes insoluble in an alkali solution as a result of the formation of a lactone under the action of an acid generated from the component (A), and (b2) a unit having an alcoholic hydroxyl group. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008076056-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005084794-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11307504-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7678527-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007161255-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019094716-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006205223-A1 |
| priorityDate |
2002-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |