| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3fb231503af1a8582e52e03694ad742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2c89ee05a92aae27dd94c933328e46d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f68c500273c9eb5f7ba1fca4b7fbd0e2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate |
2002-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_605c78213a7bce3bc5d3320956eba9d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9663602adffaf41428bca9fe8e8b324b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a443c8f6d48c54665ccf7131257eec06 |
| publicationDate |
2003-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003235986-A1 |
| titleOfInvention |
Silicon oxide etching compositions with reduced water content |
| abstract |
Silicon oxide etching solutions consisting essentially of the product of at least one bifluoride source compound dissolved in a solvent consisting of about 90% to 100% by weight of at least one carboxylic acid and 0 to about 10% by weight water, wherein the total concentration of bifluoride source compound is between about 1.25 and about 5.0 moles per kilogram of solvent. Methods for selectively removing silicon oxides and metal silicates from metal surfaces are also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004191466-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009130842-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009285022-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8119537-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7192860-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046513-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005096747-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005096747-A3 |
| priorityDate |
2002-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |