| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F222-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L45-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-06 |
| filingDate |
2003-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5db87ccedbbd5210ef735a69b767cf50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed85e603408250232c96d3f288204c62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bce402fe9e653b1cad310da7d548813
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42871f4e13c85ad6f67d5605ef7d4148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bffd32e6073275f0cf64b9612b160764 |
| publicationDate |
2003-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003215742-A1 |
| titleOfInvention |
Novel copolymers and photoresist compositions comprising same |
| abstract |
The present invention includes polymers and photoresist compositions that comprise the polymers as a resin binder component. Photoresists of the invention include chemically-amplified positive-acting resists that can be effectively imaged at short wavelengths such as sub-200 nm, particularly 193 nm. Polymers of the invention suitably contain 1) photoacid labile groups that preferably contain an alicyclic moiety; 2) a polymerized electron-deficient monomer; 3) a polymerized cyclic olefin moiety. Particularly preferred polymers of the invention are tetrapolymers or pentapolymers, preferably with differing polymerized norbornene units. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008026317-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005221219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7781157-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7147986-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010239978-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7749679-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8404427-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007148592-A1 |
| priorityDate |
2000-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |