| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3ddf8e74786fe217e780e9950c399e40 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00 |
| filingDate |
2002-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0271ceef854235d2b38a1bd6ff488a7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd0cb2e3de18a00091bac1b75e40b26c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1dc48e4174e088112d7aae0970927f1b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f08a53d725e705b7cff33989c4d75cff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_908a18105613060a49ff95e07d927511 |
| publicationDate |
2003-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003199407-A1 |
| titleOfInvention |
Composition of a resist stripper using electrolytic material with high equivalent conductivity in an aqueous solution |
| abstract |
Disclosed is a composition of resist stripper, which is advantageous in light of excellent strippability for residual resists after etching and ashing processes, and superior corrosion resistance to a metal film or a substrate formed with an inorganic material film. The stripping composition comprises 0.5-25 wt % of an electrolytic material having an equivalent conductivity of 300 Ω −1 cm 2 equiv −1 or higher in 0.001 N aqueous solution at 18° C., 60.0-99.4 wt % of water and 0.1-25.0 wt % of a corrosion inhibitor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011520142-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8497233-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008156654-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1847880-A3 |
| priorityDate |
2002-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |