| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78675 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-77 |
| filingDate |
2003-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f58313596dd279d14e3ec5ba1cdb17a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_516d3c2048b839884558833e0b5fa348 |
| publicationDate |
2003-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003197222-A1 |
| titleOfInvention |
Method for manufacturing semiconductor device, semiconductor device, electro-optical device, and electronic apparatus |
| abstract |
The invention provides a method of manufacturing a semiconductor device, capable of enhancing characteristics of each semiconductor element constituting the semiconductor device, while reducing or suppressing non-uniformity in the characteristics thereof. When forming a thin-film circuit constructed by arranging a plurality of pixel circuits on a glass substrate, first, a plurality of concave portions to be seeds in crystallizing a semiconductor film are formed on the glass substrate with a pitch n times an array pitch of a plurality of pixel circuits. Then, an amorphous silicon film is formed on the glass substrate on which the concave portions are formed, and by crystallizing the silicon film by heating, a substantially monocrystalline silicon film is formed within a region centered on the concave portions. Using each of the substantially monocrystalline silicon film formed substantially centered around the respective concave portions, pixel circuits are formed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005233594-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2099064-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107112301-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7148095-B2 |
| priorityDate |
2002-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |