| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5cfe5b217fee9fb2781f5b14d588851f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00468
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B5-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00659
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00459
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00648 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B5-084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B5-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B5-087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61K9-2095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61K9-2072 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B5-03 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61K9-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-06 |
| filingDate |
2003-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20ad213a8b2b2fc65dcc76aa2103b8d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29aeb3ba3a016d75204c3d37175ab63d |
| publicationDate |
2003-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003196599-A1 |
| titleOfInvention |
Apparatus for clamping a planar substrate |
| abstract |
The disclosure relates to an apparatus for electrostatically adhering grains to a planar substrate comprising: n a. an electrostatic chuck having a collection surface with at least one grain collection zone for, when the planar substrate is layered on the collection surface, electrostatically directing charged grains to a corresponding surface on the planar substrate; and n b. a pattern of holes through the electrostatic chuck allowing a source of low pressure to act through the electrostatic chuck to adhere the planar substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7368682-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006255025-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010194012-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009134345-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009134345-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006011594-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8469342-B2 |
| priorityDate |
1998-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |