| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5a2c13cd8c31895cdcd8a5a8c17adea8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2071-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2071-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2071-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-3154
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-3424
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-269 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C71-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-02 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C71-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18 |
| filingDate |
2002-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77b2817f193d9b9f991fbae09510b1d7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d8201ffc5fb78c01e20e244fdc01f4f |
| publicationDate |
2003-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003195312-A1 |
| titleOfInvention |
Chemically and electrically stabilized polymer films |
| abstract |
Preparation methods and stabilization processes for low k polymers that consist of sp 2 C—X and HC-sp 3 C α —X bonds. A preparation method is achieved by controlling the substrate temperature and feed rate of the polymer precursors. One stabilization process includes a post annealing of as-deposited polymer films under the presence of hydrogen under high temperatures. The reductive annealing of these films is conducted at temperatures from −20° C. to −50° C. to +20° C. to +50° C. of their Reversible Crystal Transformation (“CRT”) temperatures, then quenching the resulting films to −20° C. to −50° C. below their “CRT” temperatures. The reductive annealing is conducted before the as-deposited film was removed from a deposition system and still under the vacuum. “Re-stabilization” processes of polymer surfaces that are exposed to reactive plasma etching are also disclosed; thus, further coating by barrier metal, cap layer or etch-stop layer can be safely applied. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046044-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6962871-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7094661-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7309395-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7549905-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007216300-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005000435-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006274474-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008213579-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005218481-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005221606-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7364925-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006201426-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005274322-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007105473-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005158454-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006275547-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007077849-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005174045-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008038986-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004255862-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005146267-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7621794-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005000434-A1 |
| priorityDate |
2002-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |