| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H31-02 |
| filingDate |
2002-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15415c0ae84a6c6c4a96d8c519743429
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f37d1e626f2788e0a57e8382d19dcbaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d66727f30293e84eebd9110dda8dbebe |
| publicationDate |
2003-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003186473-A1 |
| titleOfInvention |
Electrical print resolution test die |
| abstract |
A test structure pattern includes a first comb, a second comb, and a serpentine line. The first comb includes a first set of tines of the same orientation. The second comb includes a second set of tines of the same orientation that are interdigitated with the first set of tines. The serpentine line runs between the interdigitated tines of the first metal comb and the second metal comb. The test structure pattern forms a first metal comb, a second metal comb, and a serpentine metal line on a die. Print quality and resolution is tested by checking for electrical continuity in the serpentine metal line and bridging between the serpentine metal line and one of the first metal comb and the second metal comb. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8519388-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009077986-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104752254-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011140104-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315841-B2 |
| priorityDate |
2002-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |