| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2003-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc0ddbe784ad9e2d50ef8dda80cfe573
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c46bedfe5181c64142100e780bf8560
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6600abfa82e604c33d3e8cd63e32d779 |
| publicationDate |
2003-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003180663-A1 |
| titleOfInvention |
Chemical amplification type positive resist composition |
| abstract |
The present invention provides a chemical amplification type positive resist composition comprising n (A) resin having a phenol skeleton wherein the phenol skeleton has protective group which can be dissociated by the action of an acid, the phenol skeleton itself is insoluble or poorly soluble in an alkali aqueous solution and the phenol skeleton becomes soluble in an alkali aqueous solution after dissociation of the protective group, n (B) resin obtained by protecting a part of hydroxyl group in poly(p-hydroxystyrene) with pivaloyl group and n (C) an acid generator. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8476473-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010124719-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8232039-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101665431-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005266351-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7556908-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010055609-A1 |
| priorityDate |
2002-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |