Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01072 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0103 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01005 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5225 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 |
filingDate |
2003-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2315e44ae271248d6eedd16a4875146d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c57f819f0db1c9d62325fac624278521 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_749b8a125d3fc05506979b5e4d6ea60b |
publicationDate |
2003-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2003176053-A1 |
titleOfInvention |
High permeability thin films and patterned thin films to reduce noise in high speed interconnections |
abstract |
This invention provides a structure and method for improved transmission line operation on integrated circuits. One method of the invention includes forming transmission lines in an integrated circuit. The method includes forming a first layer of electrically conductive material on a substrate. A first layer of insulating material is formed on the first layer of the electrically conductive material. A pair of high permeability metal lines are formed on the first layer of insulating material. The pair of high permeability metal lines include permalloy and/or Ni 45 Fe 55 films. A transmission line is formed on the first layer of insulating material and between and parallel with the pair of high permeability metal lines. A second layer of insulating material is formed on the transmission line and the pair of high permeability metal lines. And, the method includes forming a second layer of electrically conductive material on the second layer of insulating material. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005007817-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015068796-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6970053-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7670646-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003174529-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002145901-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8084370-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7737536-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005140462-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7829979-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7483286-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005275061-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8466016-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8921914-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7391637-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7101778-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8524618-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8759170-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8501563-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9532446-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004233010-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7327016-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7335968-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7154354-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006261448-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003142569-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8278225-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005006727-A1 |
priorityDate |
2002-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |