http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003175613-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate | 2003-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52981e54a5492066ab2119838bcf8b9c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ebffa498d99f8edd7d5aaa95a64a157 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59f7e28c937e492b277ccef1efd550a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e268444de17b4b69a2fb4c71ccaae83 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0145c7f550a2ad6f27ee97b91bf76614 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e3a66a29740ff6b746fe7fba4f0638b |
| publicationDate | 2003-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2003175613-A1 |
| titleOfInvention | 1, 2-Naphthoquinone-2-diazidesulfonate ester photosensitive agent, method for producing the photosensitive agent, and photoresist composition |
| abstract | The invention provides a 1,2-naphthoquinone-2-diazidesulfonate ester photosensitive agent which is useful as a photosensitive agent employed in a photoresist for producing semiconductor integrated circuits, liquid crystal displays, EL displays, etc., a method for producing the photosensitive agent, and a photoresist composition containing the photosensitive agent. The 1,2-naphthoquinone-2-diazidesulfonate ester photosensitive agent is produced by reacting a polyhydric phenol with 1,2-naphthoquinone-2-diazidesulfonyl chloride in the presence of a neutralizing agent, wherein the polyhydric phenol is obtained by a condensation reaction between resorcinol and at least one aldehyde selected from C3-C10 aldehydes, and contains, as a predominant component, a compound represented by formula (I) and components exhibiting a retention time as measured by using GPC shorter than that of the compound represented by formula (I) in an amount of 10% or less: n n n wherein each of R 1 , R 2 , R 3 , and R 4 represents a C2-C9 alkyl group. |
| priorityDate | 2002-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 271.