| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-977 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
2003-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec53afb62f8901912ceacfe422f38e21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b6a43cbb78ab6e621f95b1a01c3c51a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3983f55c8f6662c71fac22951cbe553e |
| publicationDate |
2003-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003170424-A1 |
| titleOfInvention |
Method for bonding and debonding films using a high-temperature polymer |
| abstract |
The invention relates to a semiconductor structure that is formed by delaminating a semiconductor substrate and by bonding the top section of the substrate to a transfer substrate. Delaminating is carried out by causing a polymer film to achieve greater adhesion that an embrittlement layer in the semiconductor substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9472437-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8764026-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011010908-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011014774-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10580678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9837295-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9859141-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8267143-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010263794-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010266373-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9064686-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9583374-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8919412-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8181688-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9281229-B2 |
| priorityDate |
2001-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |