abstract |
An objective of the present invention is to provide a ceramic substrate making it possible to control its heating face into even temperature even if through holes into which lifter pins, supporting pins and the like will be inserted are made. The present invention is a ceramic substrate having: a heating element composed of one or more circuit(s) on a surface thereof or inside thereof; and a through hole being made in the ceramic substrate, wherein the heating element circuit is formed in the range of 20 mm or less from the inner wall of the through hole. |