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filingDate 2002-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2003-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2003154590-A1
titleOfInvention Circuit member processor
abstract A multi-layer substrate 2 is reacted with supercritical water in a reaction chamber 14 whose cross section is in the form of an elongated hollow ellipse, and the reaction chamber 14 has a central part having a small curvature, exhibiting substantially a straight line, and end parts having a large curvature, so that the central part of the reaction chamber 14 is suitable for introducing flat materials such as multi-layer substrates 2 thereinto. Furthermore, the large curvature of the reaction chamber 14 at the ends thereof provides a wider inner surface, thereby enabling the reaction chamber 14 to be proof against a high pressure.
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