| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2002-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fc0d19dced3371cf3f36d25b804ba81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dadac6b0c2dc2020ccbe8285a7089c6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20bff001dee27104bc6fe42f2d5f9d93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b84a7dbf66b179d9d6dd8e5853aae00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d73fddeb26fc0eb13bbd594190fec5ec |
| publicationDate |
2003-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003153195-A1 |
| titleOfInvention |
Method and apparatus for providing modulated bias power to a plasma etch reactor |
| abstract |
A method and apparatus for modulating the bias power applied to a wafer support pedestal within a plasma etch reactor. The modulation has an on/off duty cycle of between 10 and 90 percent. Such modulation of the bias power substantially improves the verticality of the etched features located near the edge of a semiconductor wafer as the wafer is being etched in a plasma etch reactor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011177669-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10388544-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8658541-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006168794-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004097077-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017208548-A |
| priorityDate |
2002-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |