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filingDate 2002-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2003-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2003104648-A1
titleOfInvention Micromechanical component and method of manufacturing a micromechanical component
abstract A micromechanical component is described, in particular an acceleration sensor or a rotational speed sensor having functional components which are movably suspended over a substrate, opposite surfaces of the functional components being movable toward one another. The opposite surfaces of the functional components are at least partially coated with a conductive film.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7785913-B2
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priorityDate 2000-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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