http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003104642-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2002-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e25ca88412f9a1224b6fbda891201376 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9be05cfda17875e46f4e07282e3372c7 |
| publicationDate | 2003-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2003104642-A1 |
| titleOfInvention | Method of detecting protrusion of inspection object from palette and method of fabricating semiconductor device |
| abstract | In order to provide a method of detecting protrusion of an inspection object from a palette improved to be capable of making highly precise detection and reducing a socket breakage ratio, an inspection object is introduced into each of a plurality of pockets provided on the surface of a palette, which in turn is transported. A reflection level of the inspection object stored in each of the plurality of pockets is measured every palette with a reflection type photoelectric sensor. The maximum value and the minimum value of the reflection level are obtained from data of every palette, for calculating a dispersion width defined by the difference between the maximum value and the minimum value. The dispersion width is compared with a previously set determination threshold, for determining whether or not the dispersion width is greater than the determination threshold. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8498840-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2244058-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005174111-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2944866-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7301140-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010274526-A1 |
| priorityDate | 2001-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.