http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003099904-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0387 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2002-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cb5e00c64cd17c2f5257424b56e96c8 |
| publicationDate | 2003-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2003099904-A1 |
| titleOfInvention | Photosensitive formulation for buffer coatings, film containing the photosensitive formulation, and method for fabricating electronics with the photosensitive formulation |
| abstract | A photosensitive formulation for high-temperature-resistant photoresists is based on polyhydroxyamides. The photosensitive formulations display a much higher photosensitivity than the comparable formulations based on quinone azide photoactive components. After conversion to the polybenzoxazole, the novel formulations also display a lower dielectric constant than the quinone azide-based formulations. A film can be made by applying the photosensitive formulation to a wafer and then evaporating the solvent. A method for fabricating electronics and micorelectronics structures a wafer by using the film in photolithography. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008305431-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004253542-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7132205-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017071734-A |
| priorityDate | 2001-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 313.