| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-11 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B25B11-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25B11-00 |
| filingDate |
2001-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fa395d86a2393e7694307919737465a |
| publicationDate |
2003-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003094773-A1 |
| titleOfInvention |
Rotary vacuum-chuck with water-assisted labyrinth seal |
| abstract |
A rotary vacuum-chuck mounts a substrate such as a silicon wafer for rotation. The vacuum-chuck includes a hollow rotary shaft and a chuck mounted on the hollow rotary shaft and having a surface adapted to support a substrate, the surface having one or more openings in fluid communication with the hollow rotary shaft. A vacuum generator evacuates the hollow rotary shaft and the one or more openings so as to vacuum chuck a substrate to the chuck surface. A labyrinthine gap is defined between a first member that rotates with the hollow rotary shaft and a second member that is stationary. A fluid in the labyrinthine gap provides a gas-tight seal between the first and second members. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7381274-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10704147-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11421726-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8889566-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007281106-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9412581-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7964040-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109078527-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2058849-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009120464-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009120368-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103786118-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009120584-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10704142-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004255858-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9144147-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9018108-B2 |
| priorityDate |
2001-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |