| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-913 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-20 |
| filingDate |
2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83b401eff197383f3bc870303c425623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a1b9d48571a94f8ea3f5441534bdd02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd809d0d04053cf7fec7d41a233d2e78 |
| publicationDate |
2003-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003064586-A1 |
| titleOfInvention |
Method and apparatus for controlling contamination during the electroplating deposition of metals onto a semiconductor wafer surface |
| abstract |
A method and apparatus for the electroplating deposition of a metal onto a semiconductor wafer surface ( 29 ), including vibrationally scrubbing the wafer surface ( 29 ) during an electroplating process. At least one transducer ( 32 ) is mounted to a wall ( 33 ) of an electroplating tool chamber ( 22 ). The transducer ( 32 ) intermittently delivers sonic energy pulses lasting for one to two seconds to the electroplating solution during the electroplating process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010243462-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012035172-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005003737-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9273409-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9911614-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170066-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9530653-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7238085-B2 |
| priorityDate |
2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |