patent/US-2003038327-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003038327-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-097 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-10253
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P1-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08
filingDate	2002-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b1a306c545567417ea0f7708adf4c66
publicationDate	2003-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2003038327-A1
titleOfInvention	Hermetically sealed silicon micro-machined electromechanical system (MEMS) device having diffused conductors
abstract	The present invention is an apparatus and method for a micro-machined electromechanical system (MEMS) device having a hermetically sealed sensor or actuator device mechanism that is electrically interconnected by diffused conductive paths to a plurality of wire bond pads that are located external to the hermetic seal.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10910341-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010068846-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007190691-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8685834-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10099917-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10541224-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006246631-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005189635-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9420691-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7074637-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005262929-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1593649-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8143095-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005127499-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10192850-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1593649-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008009091-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7936062-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106449269-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007145564-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7221033-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7489837-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007096312-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007096311-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006166480-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488930-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005189622-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8604605-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021168299-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7608534-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005054133-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7449779-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10766768-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6936918-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008087979-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005095833-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013206465-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005170609-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6764912-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8871551-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008029879-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005139984-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012199920-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005255645-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10450190-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005095835-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005087861-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005082654-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008032457-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006102351-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6949807-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170440-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170439-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006220234-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009023249-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7275424-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9440845-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11685650-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170531-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170529-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006228066-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007172976-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7858445-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7691723-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005046001-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9434608-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004118621-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7357017-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005139967-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7534662-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170528-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6930367-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7449355-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758371-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006154443-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9548145-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007190747-A1
priorityDate	2001-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6074891-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4023562-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6346742-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4295115-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4291293-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123

Total number of triples: 105.