| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9fc0a00eab3a757e8324b1e887d7ba97 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-267
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02488
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-267 |
| filingDate |
2001-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f25d40c037c98a2320a98361f9eaa414 |
| publicationDate |
2003-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003038299-A1 |
| titleOfInvention |
Semiconductor structure including a compliant substrate having a decoupling layer, device including the compliant substrate, and method to form the structure and device |
| abstract |
High quality epitaxial layers of monocrystalline materials ( 26 ) can be grown overlying monocrystalline substrates such as large silicon wafers ( 22 ) by forming a compliant substrate for growing the monocrystalline layers ( 26 ). One way to achieve the formation of a compliant substrate includes first growing an accommodating buffer layer ( 24 ) on a silicon wafer ( 22 ). The accommodating buffer layer ( 24 ) is a layer of monocrystalline oxide spaced apart from the silicon wafer ( 22 ) by an amorphous interface layer of silicon oxide ( 28 ). The amorphous interface layer ( 28 ) dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer ( 24 ). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111223884-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10930497-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10892416-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111370435-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102017101333-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102017101333-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111211140-A |
| priorityDate |
2001-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |