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filingDate 2002-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2003-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2003038107-A1
titleOfInvention Method and apparatus for removal of unwanted electroplating deposits
abstract An apparatus and associated method for removing deposits from a substrate. In one aspect, a system is provided which supplies etchant to an edge bead removal chamber. The apparatus includes an etchant delivery system, an etchant tank, a sensor, and a mixing tank.
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