| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9fc0a00eab3a757e8324b1e887d7ba97 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-4214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B2006-1219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B2006-12171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02488
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-0261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02521 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-12002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-43 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-183 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-43 |
| filingDate |
2001-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70f965281b7dd72b8b1d499e22b55133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01a896084b5611a3ef2c442dbf33f1de |
| publicationDate |
2003-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003017640-A1 |
| titleOfInvention |
Optical interconnect and method for fabricating an optical interconnect in a photosensitive material |
| abstract |
High quality epitaxial layers of monocrystalline materials can be grown overlying monocrystalline substrates such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers. An accommodating buffer layer comprises a layer of monocrystalline oxide spaced apart from a silicon wafer by an amorphous interface layer of silicon oxide. The amorphous interface layer dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer. The accommodating buffer layer is lattice matched to both the underlying silicon wafer and the overlying monocrystalline material layer. Any lattice mismatch between the accommodating buffer layer and the underlying silicon substrate is taken care of by the amorphous interface layer. In addition, formation of a compliant substrate may include utilizing surfactant enhanced epitaxy, epitaxial growth of single crystal silicon onto single crystal oxide, and epitaxial growth of Zintl phase materials. From the foregoing, an optical interconnect can be formed in accordance with the present invention. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10545286-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10230458-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9784930-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3376272-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9094135-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9810843-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9653639-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9594220-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9766409-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113302532-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005170336-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9435952-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017053073-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013202005-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9442254-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014363172-A1 |
| priorityDate |
2001-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |