| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F232-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F222-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F222-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F6-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate |
2001-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32e320ff8505e66273d933eb41c383fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c08117d3bd1ee879611bc5b74d1a921e |
| publicationDate |
2003-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003013831-A1 |
| titleOfInvention |
Novel polymer suitable for photoresist compositions |
| abstract |
The present invention relates to a novel polymer comprising at least one unit derived from an ethylenically unsaturated compound containing at least one cyano functionality and at least one nonaromatic cyclic unit. The novel polymer is particularly useful when used in a photoresist composition sensitive in the deep ultraviolet region. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004241580-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10838298-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8771921-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018081265-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6964840-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8158325-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11415883-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007087286-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8404426-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6800414-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010035178-A1 |
| priorityDate |
2001-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |