| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-36 |
| filingDate |
2002-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2a8f7d0b5ddaaed7f32629189d593cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb1ac609aba0a0dfe8d0fe1a046485cf |
| publicationDate |
2003-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003008237-A1 |
| titleOfInvention |
Antireflective coating compositions |
| abstract |
Antireflective compositions are provided that contain an ionic thermal acid generator material. Use of such a thermal acid generator material can significantly increase the shelf life of solutions of antireflective compositions in protic media. Antireflective compositions of the invention can be effectively used at a variety of wavelengths used to expose an overcoated photoresist layer, including 248 nm and 193 nm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022291586-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7754414-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008032229-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8349533-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006068335-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010279227-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006234156-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7794919-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11026298-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10241407-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6887648-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004219453-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8460855-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005074688-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1691238-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008014529-A1 |
| priorityDate |
2001-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |