| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-952
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31511 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
2002-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a86a7dfcce1cb2b46cdca964c849c8a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38e037aa2cdf1e7e8bec97e66393f7d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e32ff508e35f2ddc0256406630ea57bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_915904ab9c1b677c95fa46f9fb54084b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa39819f553b9cbb9987e3ee8390c0b4 |
| publicationDate |
2002-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2002198333-A1 |
| titleOfInvention |
Anti-reflective coating compositions for use with low k dielectric materials |
| abstract |
Anti-reflective compositions and methods of using those compositions with low dielectric constant materials are provided. In one embodiment, the compositions include polymers comprising recurring monomers having unreacted epoxide groups. In another embodiment, the polymers further comprise recurring monomers comprising epoxide rings reacted with a light attenuating compound so as to open the ring. The compositions can be applied to dielectric layers so as to minimize or prevent reflection during the dual damascene process while simultaneously blocking via or photoresist poisoning which commonly occurs when organic anti-reflective coatings are applied to low dielectric constant layers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10698317-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019265590-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009011361-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101486841-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7833692-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11269256-B2 |
| priorityDate |
2001-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |