| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-16 |
| filingDate |
2002-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98bbbffc781b42a3564b86cdaae954fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_063acf4e5aa3577d6d8a2d20f3afe863
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c4755dd9c376dd27d8e5e3156ebea4f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bd1d783c1a534e858f70dd0050ee03e |
| publicationDate |
2002-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2002193051-A1 |
| titleOfInvention |
Apparatus and method for producing substrate with electrical wire thereon |
| abstract |
In an apparatus and method for producing a substrate whose surface includes a metallic wire by polishing the substrate surface, n a polishing liquid is supplied into a clearance between the substrate surface and a polishing pad surface of a polishing pad, which polishing liquid includes an acid for dissolving an oxidized part of the substrate surface and is prevented substantially from including solid abrasive powder, and n a relative movement is generated between the substrate surface and the polishing pad surface while pressing the substrate surface against the polishing pad surface with the polishing liquid between the substrate surface and the polishing pad surface so that the dissolved oxidized part of the substrate surface is removed from the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9333467-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7172963-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006223320-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007000872-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108608328-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7402521-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005003670-A1 |
| priorityDate |
1999-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |