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publicationDate 2002-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2002182385-A1
titleOfInvention Atomic layer passivation
abstract Materials and surfaces terminated with sulfur, phosphorous, antimony, selenium, tellurium, bromine and/or iodine atoms are suitable for the manufacture of metallic thin films by deposition of highly polarizable transition metals over an atomic passivation layer or a self-assembled layer.
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